关键词: 仿真数据管理, 语义访问接口, 本体, 语义倒排索引, 刻蚀机

Abstract: Aiming at the problem of lacking support for files semantic access interface in existing simulation data management technology,a semantic-based simulation files cross-platform accessing method was proposed and a semantic file system for managing simulation data during the development of etching machine was developed.Based on the analysis of engineering demands,a domain ontology library was developed to realize structured description of simulation project semantics.The formal model for semantic-based simulation project accessing was given,and the inverse semantic index structure was also proposed to improve the efficiency of assessing method.The developed semantic file system for simulation data management was introduced.The system could hide specific physical locations of simulation files to  enable engineers to achieve semantic-based simulation files access,query and sharing.

Key words: simulation data management, semantic access interface, ontology, inversed semantic index, etch machine