关键词: 集成电路装备, 集成平台, 服务, 数据空间, 知识描述

Abstract: To solve the problems of data integration,application integration and knowledge integration in the research process of Integrated Circuit (IC) equipment,an integrated research and development platform was proposed.Based on the principle of Everything Is Service (EIS),the application system was established and the access of product data was encapsulated as unified data for external calls.An integrated product component data view for IC equipment was presented.With the technology of data space,formal data resource modeling of heterogeneous data was realized.The method to describe heterogeneous knowledge was put forward,and knowledge application mode based on knowledge push was also implemented.The self-developed integrated platform oriented to research and development of IC equipment was introduced and its effectiveness was verified by example of the showerhead design in PECVD equipment.

Key words: integrated circuit equipment, integrated platform, service, data space, knowledge description