关键词: 蓝宝石衬底, 混合Petri网, 碳流, 绿色制造

Abstract: Sapphire substrate is widely used as substrate material of LED products,which demands high accuracy requirement and complex procedures,including wire cutting,chamfering,grinding,annealing,waxing,copper polishing,soft polishing,and cleaning.There are some issues such as high energy consumption,low energy efficiency,and low recycling utilization rate of auxiliary materials in the processing of sapphire substrate,leading to high production costs and adverse environmental impacts.Regarding the carbon emission as characterization,the carbon flow dynamic modeling of sapphire substrate production line was studied.The carbon flow system boundary of sapphire substrate production line was defined.The energy flow,material flow and carbon flow of sapphire substrate production line were analyzed,and its carbon flow dynamic model was established.Two carbon efficiency evaluation indexes based on productivity performance and economic benefits were proposed.Furthermore,according to the strong coupling characteristics of carbon emission and process,the dynamic characteristics of carbon flow in sapphire substrate production line were modeled and simulated based on Hybrid Petri net.Finally,the carbon efficiency of the production line was calculated and verified by a case study.

Key words: sapphire substrate, hybrid Petri net, carbon flow, green manufacturing