关键词: Interbay物料运输系统, 调度, 多目标, 遗传规划

Abstract: To meet the global optimization requirement of Interbay material handling system in semiconductor wafer fabrication systems,a multi-objective scheduling approach for Interbay material handling system based on composite rule was proposed.By considering constraints between various transport equipment,the multi-objective scheduling model of Interbay material handling system was established.To generate composite rules,a method based on genetic programming was proposed,in which several attributes of wafer lots were encoded with four basic arithmetic symbols in binary tree structure,and the composite scheduling rules with the best fitness were obtained by using selection,crossover,mutation and d-best policy based λ-Interchange local search method.To quickly evaluate a large number of individuals,the calculation formulas of individuals fitness were derived based on From-To table.The results of discrete event simulations showed that,compared to the scheduling methods for Interbay system in literature,these composite rules generated by the proposed algorithm achieved better comprehensive optimization on average cycle time,average delivery time and average due date satisfaction rate of wafer lots,and meanwhile had better robustness.

Key words: Interbay material handling system, scheduling, multi-objective, genetic programming