Abstract: Sapphire substrate is widely used as substrate material of LED products,which demands high accuracy requirement and complex procedures,including wire cutting,chamfering,grinding,annealing,waxing,copper polishing,soft polishing,and cleaning.There are some issues such as high energy consumption,low energy efficiency,and low recycling utilization rate of auxiliary materials in the processing of sapphire substrate,leading to high production costs and adverse environmental impacts.Regarding the carbon emission as characterization,the carbon flow dynamic modeling of sapphire substrate production line was studied.The carbon flow system boundary of sapphire substrate production line was defined.The energy flow,material flow and carbon flow of sapphire substrate production line were analyzed,and its carbon flow dynamic model was established.Two carbon efficiency evaluation indexes based on productivity performance and economic benefits were proposed.Furthermore,according to the strong coupling characteristics of carbon emission and process,the dynamic characteristics of carbon flow in sapphire substrate production line were modeled and simulated based on Hybrid Petri net.Finally,the carbon efficiency of the production line was calculated and verified by a case study.

Key words: sapphire substrate, hybrid Petri net, carbon flow, green manufacturing

摘要： 蓝宝石衬底广泛用作LED产品的衬底材料,其加工精度高且工序复杂,主要包括切片、倒角、研磨、退火、上蜡、铜抛、软抛、清洗环节。蓝宝石衬底在加工过程中存在设备能耗高、能效低且辅料回收利用率低等问题,从而导致生产成本高且对环境产生不利影响。以碳排放为表征量,对蓝宝石衬底生产线碳流动态建模开展研究。首先,定义了蓝宝石衬底生产线碳流系统边界,分析了蓝宝石衬底生产线中能量流、物料流和碳流,建立了蓝宝石衬底生产线碳流动态模型,并提出了基于生产性能与经济效益的两种碳效率评价指标;其次,根据碳排放与工艺过程的强耦合特性,基于混合Petri网对蓝宝石衬底生产线碳流动态特性进行了建模与仿真;最后,通过应用实例验证并求解了生产线的碳效率。

关键词: 蓝宝石衬底, 混合Petri网, 碳流, 绿色制造