关键词: 晶圆制造, Petri网, 故障响应, 组合设备, 重入加工

Abstract: The failure of cluster toolsprocessing module is one of the factors that wafer qualityloss in semiconductor manufacturing.Owing to the complicated processing of wafer revisiting,the effective scheduling problem for the parallel modules of revisiting dual-arm cluster tools appeared a faulty module was studied.The corresponding Petri net model was established to describe the manufacturing process of the wafer revisiting processing of the dual-arm cluster tools with parallel module and residency time constraint.The time properties of steady-state and transient system scheduling were analyzed,and an effective algorithm for steady-state system scheduling was presented.An effective operation control strategy for the transition from steady-state system scheduling before failure to steady-state system scheduling after failure was developed with virtual wafer approach,so that the steady-state system scheduling always satisfied the strict residency time constraint.The illustrative examples were given to show the feasibility of the operation control policies.It was proved that the policies realized the steady-state system scheduling after failure and minimized wafer loss.

Key words: wafer fabrication, Petri nets, failure response, cluster tools, revisiting processing