关键词: 集束型设备, 调度, 驻留约束, 重入, 总完工时间

Abstract: To solve problems of residency and reentrant constraints of cluster tools in running process effectively, a scheduling algorithm was put forward. The problem domain of describing scheduling was structured. Makespan minimizing was taken as optimization objective to set up mathematical models. On this basis, a feasible path search scheduling method of robotic operations was proposed. Combined with the characteristics of residency and reentrant constraints, a scheduling heuristic algorithm was built for cluster tools with three processing chambers.The simulation experiments were designed to evaluate the effectiveness and feasibility of proposed algorithm.

Key words: cluster tools, scheduling, residency constraints