计算机集成制造系统 ›› 2023, Vol. 29 ›› Issue (10): 3402-3412.DOI: 10.13196/j.cims.2023.10.016

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视觉辅助的激光振镜加工畸变校正及精度分析

朱铁爽1,2,张承瑞1,2+   

  1. 1.山东大学机械工程学院
    2.山东大学高效洁净机械制造教育部重点实验室
  • 出版日期:2023-10-31 发布日期:2023-11-09
  • 基金资助:
    山东省重点研发计划资助项目(2019JZZY020121)。

Distortion correction and accuracy analysis oflaser galvanometer processing assisted by machine vision

ZHU Tieshuang1,2,ZHANG Chengrui1,2+   

  1. 1.School of Mechanical Engineering,Shandong University
    2.Key Laboratory of High Efficiency and Clean Mechanical Manufacture,Ministry of Education,Shandong University
  • Online:2023-10-31 Published:2023-11-09
  • Supported by:
    Project supported by the Key Research and Development Program of Shandong Province,China (No.2019JZZY020121).

摘要: 为了解决激光振镜加工畸变校正过程中人工测量效率低、精度差的问题,提出一种视觉辅助的畸变校正和精度测量方法。该方法分析了误差来源,建立了畸变数学模型,采用螺旋式填充圆标刻配合最小包络圆检测获取振镜系统误差特征描述,用曲线拟合或线性插补算法补偿误差,最后采用误差标准测量点阵进行精度标定。实验结果表明,该方法可以消除86%图形畸变,平均相对误差为7×10-4,提升了校正精度和校正效率。

关键词: 激光振镜加工, 图形畸变, 校正精度, 机器视觉

Abstract: To solve the problems of low efficiency and poor accuracy of manual measurement in the process of distortion correction in laser galvanometer processing,a distortion correction and precision measurement method assisted by machine vision was proposed.In this method,the theoretical distortion model was established as result of error analysis.The combination of spiral-filling-circle marking and the minimum circumcircle detection were used to obtain the error description of the galvanometer system,and the error was compensated online with curve fitting algorithm or linear interpolation algorithm.Moreover,the standard circle array of error measurement was marked for accuracy calibration.Experiment results showed that the proposed method could eliminate 86% of the graphic distortion with an average relative error of 7×10-4,which improved not only accuracy but also efficiency of the correction.

Key words: laser galvanometer processing, graphic distortion, calibration accuracy, machine vision

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