关键词: 柔性集成电路基板, 颜色特征, 表面氧化, 缺陷检测

Abstract: For the precision inspection requirement of high-density and ultra-thin flexible integrated circuit substrates,a detection method of oxidation defect was presented based on color characteristics.A fast segmentation method was designed for copper surface based on local histogram adaptive threshold.Then,a two-dimensional color segmentation method based on single Gauss model for detecting oxidation defects was proposed.An 8-dimensional color feature of oxidation defect was extracted based on RGB,HSV and block strategy,which input to the DAG-SVMS classifier to classify.The precision of method could reach micron level and the minimum detection area was 15 μm2.The proposed method provided a precise copper surface defect detection system for the manufacturing process of high-density and ultra-thin flexible integrated circuit substrate and solved the problem of automatic detection of oxidation defect on copper surface.

Key words: flexible integrated circuit substrate, color characteristics, surface oxidation, defect detection