关键词: 指数加权移动平均控制器, 在线优化, 性能评估, 自动整定

Abstract: To solve the manufacturing characteristic of multi-type,small-batch and the quality reduction of controller caused by aging equipments in semiconductor manufacturing industries,an online optimization method based on performance assessment was proposed for the most common used Exponentially Weighted Moving Average (EWMA) controller.In the process of performance evaluation,a new index was proposed by taking the mean square error defined in the time series analysis as the evaluation benchmark.The performance of EWMA controller was evaluated to obtain the current optimal parameters of controller and to auto-tuning.Meanwhile,online optimization was realized by combining with the moving window technology,which could make the control system maintain the optimum condition all the time.In addition,simulation of chemical mechanical polishing process was carried out to verify the feasibility and effectiveness of proposed method.

Key words: exponentially weighted moving average controller, online optimization, performance assessment, auto-tuning