关键词: 半导体制造, 性能指标驱动, 调度方法, 工况, 极限学习机

Abstract: To solve the dispatching problem in semiconductor wafer manufacturing system with large amount of uncertain manufacturing environment,an objective-driven dynamic dispatching rule based on Extreme Learning Machine (ELM) was proposed.Through simulation system of semiconductor product line,the needed sample was obtained,and a performance predictive model was built with ELM.By using the predicted performance index and combining with the real statement production line information,the best coefficient needed by Dynamic Dispatching Rule (DDR) algorithm was calculated to help the manufacturing system dispatching lots,which could improve the overall performance of product line.The proposed dispatching rule was validated by simulation platform.

Key words: semiconductor manufacturing, objective-driven, dispatching rule, working condition, extreme learning machine