Surface oxidation defect detection of high-density flexible integrated circuit substrate
Online:2020-09-30
Published:2020-09-30
Supported by:
Project supported by the National Natural Science Foundation,China(No.61573146),the National Major Science and Technology Project,China(No.2014ZX02503),the Guangdong Provincial Applied Major Project,China(No.2015B010133003),and the Key Technology Project of Nansha District of Guangzhou City,China(No.2015GG004).