Abstract: To solve the manufacturing characteristic of multi-type,small-batch and the quality reduction of controller caused by aging equipments in semiconductor manufacturing industries,an online optimization method based on performance assessment was proposed for the most common used Exponentially Weighted Moving Average (EWMA) controller.In the process of performance evaluation,a new index was proposed by taking the mean square error defined in the time series analysis as the evaluation benchmark.The performance of EWMA controller was evaluated to obtain the current optimal parameters of controller and to auto-tuning.Meanwhile,online optimization was realized by combining with the moving window technology,which could make the control system maintain the optimum condition all the time.In addition,simulation of chemical mechanical polishing process was carried out to verify the feasibility and effectiveness of proposed method.

Key words: exponentially weighted moving average controller, online optimization, performance assessment, auto-tuning

摘要： 为解决半导体制造业中小批量、多品种的生产特性和设备老化造成的控制器性能下降的问题,针对最常用的指数加权移动平均控制器,提出一种基于性能评估的在线优化方法。在性能评估过程中,以时间序列分析中定义的输出均方差作为评判基准,提出一种新的性能评价指标。通过评估EWMA控制器的性能得到控制器当前的最优参数并自动整定,同时结合移动窗口技术实现在线优化,使控制器性能始终保持在最佳状态。为验证方法的可行性和有效性,以化学机械抛光过程的在线优化问题为实例进行了仿真实验。

关键词: 指数加权移动平均控制器, 在线优化, 性能评估, 自动整定