面向半导体生产线基于MAS模糊协同的成品率预测方法

赵婷婷,曹政才,邱明辉

Fuzzy collaborative yield prediction approach based on MAS in semiconductor wafer fabrication

计算机集成制造系统 . 2017, (第4期): 852 -859 . DOI: 10.13196/j.cims.2017.04.020