基于DBSCAN与FSVM的半导体生产线成品率预测方法

邱明辉,曹政才,刘民,刘雪莲

Yield prediction approach based on hybrid DBSCAN and FSVM algorithm in semiconductor wafer fabrication

计算机集成制造系统 . 2016, (第11期): 2594 -2601 . DOI: 10.13196/j.cims.2016.11.012