关键词: 化学机械抛光, 运动控制, 网络化递阶系统, 分布式执行, 可编程自动控制器

Abstract: To tackle such complicated system of Chemical Mechanical Polishing(CMP), PC+ NC+ distributed real-time network Programmable Automation Controller (PAC) system was proposed. Overall architecture of CMP system, software and hardware technology of main control system, subsystem for networked coordinated control and subsystem for implementing distributed control were discussed in detail. Single-zone pressure control scheme of polishing head was further studied. Experiment results showed that the established control system had high stability and reliability. It could satisfy the requirements of CMP projects.

Key words: chemical mechanical polishing, motion control, network rank system, distributed implement, programmable automation controllers