• 论文 •    

半导体生产线全局修正式重调度方法研究

李莉,乔非,许潇红,吴启迪   

  1. 同济大学 电子与信息工程学院,上海200092
  • 出版日期:2006-07-15 发布日期:2006-07-25

Complete modification rescheduling method for semiconductor wafer fabs

LI Li,QIAO Fei,XU Xiao-hong,WU Qi-di   

  1. Sch. of Electronics & Information Eng., Tongji Univ., Shanghai200092, China
  • Online:2006-07-15 Published:2006-07-25

摘要: 基于群体智能思想,提出了全局修正式半导体生产线重调度方法。首先,给出了基于群体智能思想的重调度模型;然后,在此模型基础上,给出了全局修正式重调度算法;最后,基于实际生产线的仿真模型对全局修正式重调度算法与企业原有算法进行了对比分析。仿真结果表明,在不确定的半导体生产线环境下,在适当的时候使用全局修正式重调度算法生成重调度方案,能够更好地优化模型的在制品移动次数、在制品移动速率与工件操作准时交货率等短期性能指标。目前,该方法已在某实际半导体生产线中应用并取得了良好的效果。

关键词: 半导体生产线, 重调度, 群体智能, 全局修正, 算法

Abstract: To solve rescheduling problem for semiconductor wafer fabs effectively, a swarm-intelligence-based complete modification rescheduling method was proposed. Firstly, the Swarm-Intelligence-based Rescheduling Model (SIRM) was presented. Based on SIRM, the Complete Modification Rescheduling Algorithm (CMRA) was proposed. Finally, a simulation model based on an actual wafer fab was built to compare CMRA with the existing scheduling method in the fab. Simulation results showed that CMRA was prior to the existing method of the fab on movement,Work in Process(WIP)move speed and operation due date with better performance under uncertain chip manufacturing environment. At present, the proposed method has been applied to the actual wafer fab with better performance.

Key words: semiconductor wafer fab, rescheduling, swarm intelligence, complete modification, algorithm

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